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光刻滤光片ASAHI SPECTRA Photolithography Filters

Optics used for photolithography requires the environmental durability against high temperature and high efficiency in transmission and reflection to contribute a production yield.

Asahi provides bandpass filters for mercury emission lines, longpass filters, or cold mirrors coated by ion assisted deposition (IAD) method. IAD technology assures the durability of interference film against an inhospitable environment in a photolithography apparatus such as stepper. It also achieves the stable spectral performance and high transmission or reflection.

Large format optics is available as well, ∼ 600mm diameter.

用于光刻的光学元件需要对高温环境的耐久性以及高透射和反射相结合，从而为提高产量做贡献。

Asahi为汞排放线，长通滤波器或离子辅助沉积（IAD）法涂覆的冷镜提供带通滤波器。 IAD技术确保干涉膜在光刻设备（例如步进器）中对恶劣环境的耐久性。它还实现了稳定的光谱性能和高传输或反射。

大型光学元件也可以使用，直径约600mm。

光刻滤光片ASAHI SPECTRA  i-line Bandpass Filters

High power mercury lamps are often used in for photolithography apparatus such as LSI and LCD steppers as light source, especially i-line (365nm) is the most famous line. The bandpass filters for photolithography are required to transmit the monochromatic mercury line efficiently to achieve optimal resolution for the photomask. Furthermore the reliability for environmental durability cannot be negligible to reduce running cost.

Asahi i-line bandpass filters are produced by ion assisted deposition (IAD) technology with monolithic substrate to assure the durability against high temperature and keep stable spectral performance over time.

▪Long life with stable spectral performance thanks to IAD and monolithic substrate

▪According to the requirements, CWL and FWHM are adjustable

▪Excellent coating uniformity despite of large format filter

  i-line 带通滤光片

大功率汞灯常用于光刻设备，如LSI和LCD步进电机作为光源，尤其是i系列（365nm）是*的系列。用于光刻的带通滤光片需要有效地传输单色水银线以实现光掩模的佳分辨率。此外，环境耐久性的可靠性不能忽略，以降低运行成本。

Asahi i-line带通滤波器采用离子辅助沉积（IAD）技术与单片基板产生，以确保耐高温，并保持稳定的光谱性能。

▪采用IAD和单片基板，具有稳定的光谱性能，延长使用寿命

▪根据要求，CWL和FWHM可调

▪尽管采用大型过滤器，但涂层均匀性